イオン注入熱酸化法によるシリカガラス中へのZnOナノ粒子の形成
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- Material Type
- 記事
- Author/Editor
- 雨倉 宏岸本 直樹
- Alternative Title
- Fabrication of ZnO nanoparticles in silica glass by ion implantation combined with thermal oxidation
- Periodical title
- 真空 = Journal of the Vacuum Society of Japan
- No. or year of volume/issue
- 50(2) 2007.2
- Volume
- 50
- Issue
- 2
- Pages
- 128～134