低コヒーレンス位相シ...

低コヒーレンス位相シフト干渉法を用いたナノ潤滑膜の三次元画像計測

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低コヒーレンス位相シフト干渉法を用いたナノ潤滑膜の三次元画像計測

Call No. (NDL)
Z16-1056
Bibliographic ID of National Diet Library
8872001
Material type
記事
Author
張 賀東ほか
Publisher
東京 : 日本機械学会 ; 1979-2010
Publication date
2007-06
Material Format
Paper
Journal name
日本機械学会論文集. C編 73(730) 2007.6
Publication Page
p.1862~1868
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Paper

Material Type
記事
Author/Editor
張 賀東
三矢 保永
坂野 貴裕 他
Alternative Title
Three-dimensional measurements of nanometer-thick lubricant films using low-coherence phase-shifting interferometry
Periodical title
日本機械学会論文集. C編
No. or year of volume/issue
73(730) 2007.6
Volume
73
Issue
730
Pages
1862~1868