先端LSIにおけるNBTIの故障物理と評価 (先端LSI技術と信頼性)
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- Material Type
- 記事
- Author/Editor
- 大日方 浩二
- Series Title
- Author Heading
- Alternative Title
- Failure physics and evaluation of NBTI in advanced LSI
- Periodical title
- 信頼性 = The journal of Reliability Engineering Association of Japan : 日本信頼性学会誌
- No. or year of volume/issue
- 29(4) (通号 160) 2007.7
- Volume
- 29
- Issue
- 4