共焦点型3次元蛍光X...

共焦点型3次元蛍光X線分析装置の開発と微小部深さ方向分析への応用 (第26回表面科学講演大会論文特集(2))

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共焦点型3次元蛍光X線分析装置の開発と微小部深さ方向分析への応用

(第26回表面科学講演大会論文特集(2))

Call No. (NDL)
Z15-379
Bibliographic ID of National Diet Library
8922348
Material type
記事
Author
辻 幸一ほか
Publisher
東京 : 日本表面科学会
Publication date
2007-08
Material Format
Paper
Journal name
表面科学 = Journal of the Surface Science Society of Japan / 日本表面科学会 編 28(8) 2007.8
Publication Page
p.447~452
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Paper

Material Type
記事
Author/Editor
辻 幸一
野寺 雄太
中野 和彦
Alternative Title
Development of confocal 3D X-ray fluorescence instrument and its applications to micro depth profiling
Periodical title
表面科学 = Journal of the Surface Science Society of Japan / 日本表面科学会 編
No. or year of volume/issue
28(8) 2007.8
Volume
28
Issue
8