集束イオンビームを用いた電子光学系輪帯瞳用アパーチャの作製
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 藤原 誠田中 武雄志水 一平 他
- Alternative Title
- Development of micro-aperture for annular pupil on electron optics by focused ion beam technique
- Periodical title
- 真空 = Journal of the Vacuum Society of Japan
- No. or year of volume/issue
- 50(10) 2007.10
- Volume
- 50
- Issue
- 10
- Pages
- 639～643