機能性遷移金属酸化物薄膜の極限ナノ加工
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- Material Type
- 記事
- Title
- Author/Editor
- 鈴木 直毅田中 秀和柳澤 吉彦 他
- Alternative Title
- Nano fabrication of functional transition metal oxide thin films
- Periodical title
- Journal of the Vacuum Society of Japan = 真空
- No. or year of volume/issue
- 51(1) 2008.1
- Volume
- 51
- Issue
- 1
- Pages
- 37～43