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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 土肥 俊郎黒河 周平
- Series Title
- Alternative Title
- High efficiency CMP technology with a closed atmosphere control bell-jar type polishing machine
- Periodical title
- Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
- No. or year of volume/issue
- 52(3) (通号 307) 2008.3
- Volume
- 52
- Issue
- 3