ラマン分光法によるDLC膜中水素濃度の分析
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- Material Type
- 記事
- Author/Editor
- 三浦 健一中村 守正
- Alternative Title
- Qualitative analysis of hydrogen concentration in DLC films by Raman spectroscopy
- Periodical title
- 表面技術 = Journal of the Surface Finishing Society of Japan
- No. or year of volume/issue
- 59(3) 2008.3
- Volume
- 59
- Issue
- 3
- Pages
- 203～205