シャンティングアークによる成膜プロセス (小特集 プラズマイオンプロセス最前線)
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- Material Type
- 記事
- Title
- Author/Editor
- 高木 浩一行村 建
- Series Title
- Alternative Title
- Deposition process using a shunting arc discharge
- Periodical title
- Journal of the Vacuum Society of Japan = 真空
- No. or year of volume/issue
- 51(2) 2008.2
- Volume
- 51
- Issue
- 2