外径70mmのコンフラットフランジにマウントした簡易型金属蒸着源の製作
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- Material Type
- 記事
- Author/Editor
- 飯島 千尋間瀬 一彦奥沢 誠
- Alternative Title
- Simple evaporator for metal evaporation mounted on a conflat flange with an outer diameter of 70 mm
- Periodical title
- Journal of the Vacuum Society of Japan = 真空
- No. or year of volume/issue
- 51(2) 2008.2
- Volume
- 51
- Issue
- 2
- Pages
- 99～101