イオンビーム照射ポリフッ化ビニリデン薄膜のエッチング挙動--エッチング前処理・照射イオン効果の検討 (特集号 高分子表面・界面の新展開(2))
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- Material Type
- 記事
- Author/Editor
- 八巻 徹也Rosiah Rohani越川 博 他
- Series Title
- Author Heading
- Alternative Title
- Etching behavior of Poly(vinylidene fluoride) thin films irradiated with ion beams: effect of irradiated ions and pretreatment
- Periodical title
- 高分子論文集 = Japanese journal of polymer science and technology
- No. or year of volume/issue
- 65(3) 2008
- Volume
- 65
- Issue
- 3