単軸負荷下における銅薄膜の変形挙動のX線的評価 (小特集 結晶回折法および電子線後方散乱法による材料評価)
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- Material Type
- 記事
- Author/Editor
- 秋庭 義明鈴木 剛木村 英彦
- Series Title
- Alternative Title
- X-ray evaluation of deformation behaviour of copper thin films under uniaxial loading
- Periodical title
- 日本機械学会論文集. A編
- No. or year of volume/issue
- 74(739) 2008.3
- Volume
- 74
- Issue
- 739