Kinetics of subsurface formation during metal-organic vapor phase epitaxy growth of InP and InGaP

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Kinetics of subsurface formation during metal-organic vapor phase epitaxy growth of InP and InGaP

Call No. (NDL)
Z53-A375
Bibliographic ID of National Diet Library
9441017
Material type
記事
Author
Takayuki Nakanoほか
Publisher
Tokyo : The Japan Society of Applied Physics
Publication date
2008-03
Material Format
Digital
Journal name
Japanese journal of applied physics : JJAP 47(3) (1) 2008.3
Publication Page
p.1473~1478
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Digital

Material Type
記事
Author/Editor
Takayuki Nakano
Masakazu Sugiyama
Yoshiaki Nakano 他
Periodical title
Japanese journal of applied physics : JJAP
No. or year of volume/issue
47(3) (1) 2008.3
Volume
47
Issue
3
Other Volume
1
Pages
1473~1478