レーザー超音波による精密音速測定と半導体プロセスの温度計測への応用
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- Material Type
- 記事
- Author/Editor
- 松田 洋一中野 英俊永井 聰 他
- Alternative Title
- Precise sound velocity measurement using laser ultrasound and its application for temperature measurement in semiconductor processing
- Periodical title
- 非破壊検査 : Jjournal of the Japanese Society for Non-destructive Inspection / 日本非破壊検査協会 編
- No. or year of volume/issue
- 57(4) 2008.4
- Volume
- 57
- Issue
- 4
- Pages
- 204～209