パルスレーザー堆積法によりシクロオレフィンポリマー基板上に作製したアルミニウムドープ酸化亜鉛系透明導電膜 (第48回真空に関する連合講演会プロシーディングス--2007年11月14日～16日,東京)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 中村 篤宏道畑 良太青木 孝憲 他
- Series Title
- Alternative Title
- Fabrication of Al-doped transparent conducting ZnO film on COP substrates by PLD method
- Periodical title
- Journal of the Vacuum Society of Japan = 真空
- No. or year of volume/issue
- 51(3) 2008.3
- Volume
- 51
- Issue
- 3