スパッタプラズマ中の高エネルギー粒子計測と制御 (小特集 スパッタリングをめぐる技術)
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- Material Type
- 記事
- Author/Editor
- 豊田 浩孝
- Series Title
- Author Heading
- Alternative Title
- Measurement and control of high energy particles in sputter plasma
- Periodical title
- Journal of the Vacuum Society of Japan = 真空
- No. or year of volume/issue
- 51(4) 2008.4
- Volume
- 51
- Issue
- 4