フォトリソグラフィとアノード酸化を利用したAl薄膜の表面加工
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- Material Type
- 記事
- Author/Editor
- 勝又 信行石田 正文斎藤 修
- Alternative Title
- Surface patterning of Al thin film using photolithography and anodization
- Periodical title
- 表面技術 = Journal of the Surface Finishing Society of Japan
- No. or year of volume/issue
- 59(5) 2008.5
- Volume
- 59
- Issue
- 5
- Pages
- 333～339