Effect of CH/C2 species density on surface morphology of diamond film grown by microwave plasma jet chemical vapor deposition
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- Material Type
- 記事
- Author/Editor
- Chun-Hsi SuChing-Yu Chang
- Author Heading
- Periodical title
- Materials transactions
- No. or year of volume/issue
- 49(6) 2008.6
- Volume
- 49
- Issue
- 6
- Pages
- 1380～1384
- Publication date of volume/issue (W3CDTF)
- 2008-06