Application of vertical comb-drive MEMS mirror for a phase shift device (Special issue on "MEMS-based optical sensing devices and systems")
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- Material Type
- 記事
- Author/Editor
- Daisuke InoueFumikazu OohiraKazuya Yamamoto 他
- Author Heading
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 128(6) 2008.6
- Volume
- 128
- Issue
- 6
- Pages
- 261～265