多重磁極型高周波マグネトロンスパッタ法によるCo薄膜の基板温度依存性
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- Material Type
- 記事
- Author/Editor
- 桑原 豪後藤 貴則佐々重 光祐 他
- Alternative Title
- Dependence on substrate temperature of the properties of Co thin films fabricated by RF magnetron sputtering with multipolar magnetic plasma confinement
- Periodical title
- Journal of the Vacuum Society of Japan = 真空
- No. or year of volume/issue
- 51(6) 2008.6
- Volume
- 51
- Issue
- 6
- Pages
- 405～407