原子間力顕微鏡法を用いたLSI用Cu配線の腐食挙動解析
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- Material Type
- 記事
- Author/Editor
- 本棒 享子馬渕 勝美山田 真治
- Alternative Title
- In-situ analysis of corrosion behavior of copper wiring system in LSI by atomic force microscopy
- Periodical title
- 表面技術 = Journal of the Surface Finishing Society of Japan
- No. or year of volume/issue
- 59(7) 2008.7
- Volume
- 59
- Issue
- 7
- Pages
- 470～476