シリコン表面への炭素系ガスの吸着 (小特集「Si表面の炭素系ガスによる汚染,吸着,反応」)
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- Material Type
- 記事
- Title
- Author/Editor
- 高岡 毅楠 勲
- Series Title
- Periodical title
- 真空 = Journal of the Vacuum Society of Japan
- No. or year of volume/issue
- 41(12) 1998.12
- Volume
- 41
- Issue
- 12
- Pages
- 981～991