AIP法により作製したTiN,CrN,Cr2NおよびAlTiN膜の熱膨張率および二軸弾性率の温度依存性
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- Material Type
- 記事
- Author/Editor
- 山本 兼司佐藤 俊樹岩村 栄治
- Periodical title
- 表面技術 = Journal of the Surface Finishing Society of Japan
- No. or year of volume/issue
- 50(1) 1999.01
- Volume
- 50
- Issue
- 1
- Pages
- 52～57
- Publication date of volume/issue (W3CDTF)
- 1999-01