Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 山崎 裕史小川 育生柳澤 雅弘 他
- Series Title
- Alternative Title
- Fabrication of micromirror array embedded in PLC and stacked integration of in-line power monitor
- Periodical title
- 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
- No. or year of volume/issue
- 108(417) 2009.1.29・30
- Volume
- 108
- Issue
- 417