Semiconductor measurement technology [microform] : evolution of silicon materials characterization : lessons learned for improved manufacturing / W. Murray Bullis ; prepared for Semiconductor Electronics Division, Electronics and Electrical Engineering Laboratory, National Institute of Standards and Technology" (NIST special publication ; 400-92)

Semiconductor measurement technology [microform] : evolution of silicon materials characterization : lessons learned for improved manufacturing / W. Murray Bullis ; prepared for Semiconductor Electronics Division, Electronics and Electrical Engineering Laboratory, National Institute of Standards and Technology"

(NIST special publication ; 400-92)

国立国会図書館請求記号: YCA-C 13.10:400-92
国立国会図書館書誌ID: 000006590357

資料種別: 図書

著者: Bullis, W. Murray, 1930-ほか

出版者: -

出版年: 1993

資料形態: マイクロ

ページ数・大きさ等: microfiche ; 11 × 15 cm

NDC: -

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資料に関する注記

一般注記：: Distributed to depository libraries in microficheShipping list no.: 94-0057-PPaper version no longer for sale by the Supt. of Docs...

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資料種別: 図書
タイトル: Semiconductor measurement technology [microform] : evolution of silicon materials characterization : lessons learned for improved manufacturing / W. Murray Bullis ; prepared for Semiconductor Electronics Division, Electronics and Electrical Engineering Laboratory, National Institute of Standards and Technology"
シリーズタイトル: NIST special publication ; 400-92
著者標目: Bullis, W. Murray, 1930-
National Institute of Standards and Technology (U.S.) . Semiconductor Electronics Division
出版年（W3CDTF）: 1993
数量: microfiche
大きさ: 11 × 15 cm
並列タイトル等: Evolution of silicon materials characteristics, lessons learned for improved manufacturing
出版地（国名コード）: US
本文の言語コード: eng
資料種別（注記）: [microform]
件名標目: Semiconductors
Semiconductor wafers
Integrated circuits -- Wafer-scale integration -- United States
一般注記: Distributed to depository libraries in microfiche
Shipping list no.: 94-0057-P
Paper version no longer for sale by the Supt. of Docs
"July 1993."
Physical description for original version: iv, 27, 201-211 p. : 28 cm
書誌注記: Includes bibliographical references (p. 23-25)
原資料等に関する注記: 原資料の出版事項: Gaithersburg, MD ; Washington, D.C. : U.S. Dept. of Commerce, National Institute of Standards and Technology : For sale by the Supt. of Docs., U.S. G.P.O., 1993
SUPTDOC番号: C 13.10: 400-92
GPO管理番号: 0247 (MF)
所蔵機関: 国立国会図書館
請求記号: YCA-C 13.10:400-92
連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
書誌ID（NDLBibID）: 000006590357
http://id.ndl.go.jp/bib/000006590357
OCLC番号: 30143803
https://www.worldcat.org/oclc/30143803
整理区分コード: 281