位相シフト不要なワン...

位相シフト不要なワンショット形状計測 : 広視野レーザー走査型干渉計との組み合わせ (特集 非接触検査・計測技術の最新動向)

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位相シフト不要なワンショット形状計測 : 広視野レーザー走査型干渉計との組み合わせ

(特集 非接触検査・計測技術の最新動向)

Call No. (NDL)
Z14-B474
Bibliographic ID of National Diet Library
028343396
Material type
記事
Author
新田 勇ほか
Publisher
東京 : 日本工業出版
Publication date
2017-07
Material Format
Paper
Journal name
検査技術 / 検査技術編集委員会 編 22(7)=249:2017.7
Publication Page
p.47-52
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Paper

Material Type
記事
Author/Editor
新田 勇
月山 陽介
Alternative Title
Single-shot Interferometry without phase shift technique
Periodical title
検査技術 / 検査技術編集委員会 編
No. or year of volume/issue
22(7)=249:2017.7
Volume
22
Issue
7