銅スパッタ薄膜内部の残留応力分布のX線測定 (特集 X線材料強度)
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- Material Type
- 記事
- Author/Editor
- 秋庭 義明木村 英彦坂上 卓
- Series Title
- Alternative Title
- Measurement of residual stress distribution in sputtered Cu thin films by X-ray method
- Periodical title
- 材料 / 日本材料学会 [編]
- No. or year of volume/issue
- 58(7) 2009.7
- Volume
- 58
- Issue
- 7