詳細情報
- ID
- 00536777
- 典拠種別Type of Authority
- 団体名Corporate Names
- 名称/タイトルName / Title
- Semiconductor Equipment and Materials Institute, Incorporated
- 別名/別タイトルVariant Name(s) / Title(s)
- Semiconductor Equipment and Materials Institute;
SEMI(略称)
- 出典Sources
- 半導体製造装置通信スタンダード (SECS) / Semiconductor Equipment and Materials Institute, Incorporated. [著] ; SEMIジャパン [訳]
- 作成日Date Created
- 1997-08-07
- 最終更新日Last Updated
- 2009-01-20T17:18:39
- 他形式のデータOther formats
- RDF/XML形式RDF/XML format, RDF/Turtle形式RDF/Turtle format, JSON-LD形式JSON-LD format
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